Atec VIC-MS-60 User Manual download pdf (Page 2)

Vacuum Instrument Corporation

2099 Ninth Avenue • Ronkonkoma NY 11779 • Tel 631 737 0900 • Fax 631 737 1541

www.vicleakdetection.com • email [email protected]

REVF090210

* Performance determined in accordance with American Vacuum Society Standards; Specifications subject to change without notice.

MS●60 PERFORMANCE SPECIFICATIONS

Characteristics Units 7 CFM 10.6 CFM

Sensitivity, vacuum *

5.0 x 10

-12

Sensitivity, sniffing 1.0 x 10

-8

Leak Measurement Range

atm-cc/sec

5.0 x 10

-12

to 1.0 x 10

-4

(10 w/ext pump)

Leak Ranging - Auto/Manual

Start-up time minutes <3

Response Time * seconds <2 direct

Resolution for

He * - 14

Mass Spectrometer Tube - 180° deflection; dual-magnetic sector

Auto-tuning - Yes

Auto-calibration - Internal – yes; External - manual

Auto-zeroing - Yes, 3 modes: Normal, Spray and Hold

Reject set-point - Yes

Built-in calibrated leak - Yes

NIST traceable - Yes

Temperature compensated - Yes

He Scan - Yes

Filaments - 2 - Lanthanum/Yttrium

Maximum Operating Pressure Torr 7.5, 760 w/ext roughing option

Display - Alpha/Numeric

Units - atm cc/s, mbar*l/s, Pa*M

/sec

I/O -

0-5V or 0-10V chart; Linear Mantissa and Exponent or Logarithmic LR

and Port Pressure and Foreline Pressure

Digital I/O (PLC interface) - 6-output, 7-input

Printer Port - Yes

RS-232C - Yes

Software - Password security, 3-mode auto-zero

VACUUM SYSTEM

Vacuum Mode - Direct, reverse or combination flow

Roughing Pump cfm 7 rotary vane 10.6 rotary vane

High Vacuum Pump liters/second 61 turbomolecular

Vacuum Gauging - Pirani: Test port & foreline; Ion: High vacuum

Test Port Connection - NW25

PHYSICAL

Dimensions (W x H x D) Inches (cm) 21 x 16.9 x 16.5 (53.3 x 42.9 x 41.9)

Weight lbs. (kg) 133 (60.3) 135 (61.2)

ELECTRICAL

Power V/Hz/A 115/50-60/8; 230-240/50-60/5; 100/50-60/8

1 2

REVF090210 2

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